NTK Ceratec – Electrostatic Chuck
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics. We can provide electrostatic chucks and ceramic heaters catering to user needs by utilizing sever...
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics. We can provide electrostatic chucks and ceramic heaters catering to user needs by utilizing several material technologies. We can also provide services for the development and experimental production of electrostatic chucks and ceramic heaters according to region of use such as plasma and electron beam environments:
Electrostatic chuck with heater (ESC/Heater)
Material: AIN (Aluminum nitride)
Electrostatic chucks (ESC)
Material: Al2O3(Alumina) plate
Material: Thermal sprayed Al2O3
Ceramic heater
Material: AIN (Aluminum nitride)